Performance and evaluation methods of chemical filters for electronic clean rooms

The air chemical contaminants in the electronic clean rooms will directly affect the quality and yield of semiconductor products. The performance and evaluation methods of chemical filters are important for controlling the concentration of air chemical contaminants in electronic clean rooms. In this study, performance testing is conducted on 19 chemical filters for the electronic clean rooms with reference to the performance test method for air cleaning devices provided by relevant standards, and the purification performance of different chemical filters for acid, alkali and VOC air chemical contaminants is analysed. Compared with the mass dirt holding capacity, the Molar dirt holding capacity is more effective in evaluating the service life of the same dual-effect chemical filter for treating different contaminants. The purification performance against toluene under different volume fractions of 9×10-6, 45×10-6, 90×10-6is tested respectively on a chemical filter, and the results show that its dirt holding capacity and adhesion decrease with the decrease of loading concentration. In addition, considering the purification performance and resistance performance of the chemical filter, the performance of the acid and alkali chemical filters is compared by using the comprehensive energy efficiency index. According to the grading method for general ventilation air purification devices provided by ISO, the toluene purification performance of chemical filters for electronic clean rooms is classified. The tested chemical filters are all graded as middle rank (md) and cannot be effectively distinguished. In the future, there will be a need for more refined grading methods specifically tailored to chemical filters for such special application scenarios.